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図書

光学超薄膜偏光素子の開発と軟X線エリプソメトリーへの応用

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光学超薄膜偏光素子の開発と軟X線エリプソメトリーへの応用

Material type
図書
Author
山本正樹研究代表者
Publisher
[山本正樹]
Publication date
1999.3
Material Format
Paper
Capacity, size, etc.
30cm
NDC
-
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科学研究費補助金(基盤研究(B)(2))研究成果報告書Leave the NDL website.

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Paper

Material Type
図書
Title Transcription
コウガク チョウハクマク ヘンコウ ソシ ノ カイハツ ト ナンXセン エリプソメトリー エノ オウヨウ
Author/Editor
山本正樹研究代表者
Author Heading
山本, 正樹 ヤマモト, マサキ
Publication, Distribution, etc.
Publication Date
1999.3
Publication Date (W3CDTF)
1999
Size
30cm
Alternative Title
平成9年度〜平成10年度科学研究費補助金(基盤研究(B)(2))研究成果報告書(研究課題番号09555007)