二重SOI構造による高温度用加速度センサ

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Material Type: 図書
Title: 二重SOI構造による高温度用加速度センサ
Title Transcription: ニジュウ SOI コウゾウニヨルコウオンドヨウカソクドセンサ
Author/Editor: 研究代表者石田誠
Author Heading: 石田, 誠イシダ, マコト
https://ci.nii.ac.jp/author/DA08333164
松本, 佳宣マツモト, ヨシノリ
https://ci.nii.ac.jp/author/DA10392290
桜井, 止水城サクライ, シズキ
https://ci.nii.ac.jp/author/DA10401697
Publication, Distribution, etc.: 石田誠
Publication Date: 1996.3
Publication Date (W3CDTF): 1996
Size: 30cm
Alternative Title: 平成7年度科学研究費補助金(試験研究(B)(2))研究成果報告書
Place of Publication (Country Code): ja
NDC 9th ed.: 549.8 : Electronic engineering
Target Audience: 一般
Note (General): 研究課題番号: 06555102
研究分担者: 松本佳宣, 桜井止水城
Related Material: 科学研究費補助金(試験研究B(2))研究成果報告書
https://cir.nii.ac.jp/crid/1130000796476736640
Related Material (URI): https://ci.nii.ac.jp/ncid/BN15760681#entity
Periodical Title: 科学研究費補助金(試験研究B(2))研究成果報告書
https://cir.nii.ac.jp/crid/1130000796476736640
Data Provider (Database): 国立情報学研究所 : CiNii Research
Original Data Provider (Database): CiNii Books
https://ci.nii.ac.jp/books
NCID: https://ci.nii.ac.jp/ncid/BN15760681 : BN15760681