図書

赤外線偏光レーザを用いたシリコン単結晶板の内部応力計測法の開発

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赤外線偏光レーザを用いたシリコン単結晶板の内部応力計測法の開発

Material type
図書
Author
研究代表者:新津靖
Publisher
[東京電機大学]
Publication date
1995.3
Material Format
Paper
Capacity, size, etc.
26cm
NDC
-
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科学研究費補助金(試験研究B)研究成果報告書Leave the NDL website.

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Paper

Material Type
図書
Title Transcription
セキガイセン ヘンコウ レーザ オ モチイタ シリコン タンケッショウバン ノ ナイブ オウリョク ケイソクホウ ノ カイハツ
Author/Editor
研究代表者:新津靖
Author Heading
新津, 靖 ニイツ, ヤスシ
Publication, Distribution, etc.
Publication Date
1995.3
Publication Date (W3CDTF)
1995
Size
26cm
Place of Publication (Country Code)
ja