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Bibliographic Record
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- Material Type
- 図書
- ISBN
- 081945169X
- Author/Editor
- Jung-Chih Chiao ... [et al.], chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering ; cosponsored by the University of Western Australia (Australia) [and] Defence Science and Technology (Australia)
- Author Heading
- Publication, Distribution, etc.
- Publication Date
- c2004
- Publication Date (W3CDTF)
- 2004
- Size
- 28 cm
- Alternative Title
- Device and process technologies for MEMS and microelectronics