図書

電子エネルギー損失分光法を用いた原子層CVDにおける反応メカニズムの研究

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電子エネルギー損失分光法を用いた原子層CVDにおける反応メカニズムの研究

Material type
図書
Author
安田幸夫著
Publisher
[出版者不明]
Publication date
1999.3
Material Format
Paper
Capacity, size, etc.
30cm
NDC
-
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課題番号:08455019

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Paper

Material Type
図書
Title Transcription
デンシ エネルギー ソンシツ ブンコウホウ オ モチイタ ゲンシソウ CVD ニ オケル ハンノウ メカニズム ノ ケンキュウ
Author/Editor
安田幸夫著
Publication, Distribution, etc.
Publication Date
1999.3
Publication Date (W3CDTF)
1999
Size
30cm
Alternative Title
平成8年度-平成10年度科学研究費補助金(基盤研究B2)研究成果報告書