Resonant MEMS : fundamentals, implementation and application

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Note (General)：: Includes bibliographical references and indexOther editors : Isabelle Dufour, Stephen M. Heinrich, and Fabien Josse

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Material Type: 図書
ISBN: 9783527335459
Title: Resonant MEMS : fundamentals, implementation and application
Author/Editor: edited by Oliver Brand ... [et al.]
Author Heading: Brand, Oliver
https://ci.nii.ac.jp/author/DA12261781
Dufour, Isabelle
Heinrich, Stephen M.
Josse, Fabien
Publication, Distribution, etc.: Wiley-VCH
Publication Date: c2015
Publication Date (W3CDTF): 2015
Size: 26 cm
Place of Publication (Country Code): gw
Text Language Code: en
Subject Heading: Microelectromechanical systems
Target Audience: 一般
Note (General): Includes bibliographical references and index
Other editors : Isabelle Dufour, Stephen M. Heinrich, and Fabien Josse
Related Material: Advanced micro & nanosystems
https://cir.nii.ac.jp/crid/1130282269291065344
Related Material (URI): https://ci.nii.ac.jp/ncid/BB21819252#entity
Periodical Title: Advanced micro & nanosystems
https://cir.nii.ac.jp/crid/1130282269291065344
Data Provider (Database): 国立情報学研究所 : CiNii Research
Original Data Provider (Database): CiNii Books
https://ci.nii.ac.jp/books
NCID: https://ci.nii.ac.jp/ncid/BB21819252 : BB21819252