図書

Silicon processing : a symposium

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Silicon processing : a symposium

Material type
図書
Author
sponsored by ASTM Committee F-1 on Electronics, National Bureau of Standards, and Stanford University, San Jose, Calif., 19-22 Jan. 1982 / D.C. Gupta, editor
Publisher
ASTM
Publication date
c1983
Material Format
Paper
Capacity, size, etc.
24 cm
NDC
-
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Notes on use

Note (General):

Papers presented at the Symposium on Silicon Processing, held in San Jose, Calif., Jan 19-22, 1982"ASTM publication code number (PCN) 04-804000-46."In...

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Paper

Material Type
図書
Author/Editor
sponsored by ASTM Committee F-1 on Electronics, National Bureau of Standards, and Stanford University, San Jose, Calif., 19-22 Jan. 1982 / D.C. Gupta, editor
Publication, Distribution, etc.
Publication Date
c1983
Publication Date (W3CDTF)
1983
Size
24 cm
Place of Publication (Country Code)
us
Text Language Code
en