Ion dose control under sheath-lens effect in plasma ion implantation

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Note (General)：: Thesis (Ph.D.)--Nagoya University. Graduate School of Engineering, 2008Kind of academic degree: 博士(工学)Date degree granted: 2008-01-31...

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Material Type: 図書
Title: Ion dose control under sheath-lens effect in plasma ion implantation
Author/Editor: by Nicolas R.D. Holtzer
Author Heading: Holtzer, Nicolas Robert
Publication, Distribution, etc.: [s.n.]
Publication Date: [2008]
Publication Date (W3CDTF): 2008
Size: 30 cm
Alternative Title: シースレンズ効果下のプラズマイオン注入におけるイオンドーズ制御
Text Language Code: en
Target Audience: 一般
Note (General): Thesis (Ph.D.)--Nagoya University. Graduate School of Engineering, 2008
Kind of academic degree: 博士(工学)
Date degree granted: 2008-01-31
Report number: 甲第7700号
Diploma number: 工博第2155号
Related Material (URI): https://ci.nii.ac.jp/ncid/BB13055403#entity
Data Provider (Database): 国立情報学研究所 : CiNii Research
Original Data Provider (Database): CiNii Books
https://ci.nii.ac.jp/books
NCID: https://ci.nii.ac.jp/ncid/BB13055403 : BB13055403