Proceedings of the Fourth International Symposium on Process Physics and Modeling in Semiconductor Technology

Material type: 図書

Author: editors, G. R. Srinivasan, C. S. Murthy, S. T. Dunham ; [sponsored by] Electronics Division

Publisher: Electrochemical Society

Publication date: c1996

Material Format: Paper

Capacity, size, etc.: 23 cm

NDC: -

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Notes on use

Note (General)：: "held in Los Angeles, California, May 5-10, 1996, as part of the Spring Meeting of the Electrochemical Society."

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Paper

Material Type: 図書
ISBN: 1566771544
Title: Proceedings of the Fourth International Symposium on Process Physics and Modeling in Semiconductor Technology
Author/Editor: editors, G. R. Srinivasan, C. S. Murthy, S. T. Dunham ; [sponsored by] Electronics Division
Author Heading: Symposium on Process Physics and Modeling in Semiconductor Technology
https://ci.nii.ac.jp/author/DA07269423
Srinivasan, G. R.
https://ci.nii.ac.jp/author/DA07269456
Murthy, C. S.
https://ci.nii.ac.jp/author/DA10172534
Dunham, S. T.
Electrochemical Society. Electronics Division
https://ci.nii.ac.jp/author/DA0357072X
Publication, Distribution, etc.: Electrochemical Society
Publication Date: c1996
Publication Date (W3CDTF): 1996
Size: 23 cm
Place of Publication (Country Code): us
Text Language Code: en
Target Audience: 一般
Note (General): "held in Los Angeles, California, May 5-10, 1996, as part of the Spring Meeting of the Electrochemical Society."
Related Material: Proceedings
https://cir.nii.ac.jp/crid/1130282269273401728
Related Material (URI): https://ci.nii.ac.jp/ncid/BA28548360#entity
https://lccn.loc.gov/95083752
Periodical Title: Proceedings
https://cir.nii.ac.jp/crid/1130282269273401728
Data Provider (Database): 国立情報学研究所 : CiNii Research
Original Data Provider (Database): CiNii Books
https://ci.nii.ac.jp/books
NCID: https://ci.nii.ac.jp/ncid/BA28548360 : BA28548360
LC Control Number: 95083752
https://lccn.loc.gov/95083752