Studies on microcrystalline silicon film growth in high-density silane and hydrogen plasma

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Note (General)：: Thesis (Ph.D.)--Nagoya University, 2001Kind of academic degree: 博士(工学)Date degree granted: 2001-03-26...

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Material Type: 図書
Title: Studies on microcrystalline silicon film growth in high-density silane and hydrogen plasma
Author/Editor: Kazuya Murata
Author Heading: 村田, 和哉ムラタ, カズヤ
Publication, Distribution, etc.: [出版者不明]
Publication Date: [2001]
Publication Date (W3CDTF): 2001
Size: 30 cm
Alternative Title: 高密度シラン・水素プラズマによる微結晶シリコン薄膜の成長に関する研究
Text Language Code: en
Target Audience: 一般
Note (General): Thesis (Ph.D.)--Nagoya University, 2001
Kind of academic degree: 博士(工学)
Date degree granted: 2001-03-26
Report number: 甲第5085号
Diploma number: 工博第1540号
Related Material (URI): https://ci.nii.ac.jp/ncid/BB13815234#entity
Data Provider (Database): 国立情報学研究所 : CiNii Research
Original Data Provider (Database): CiNii Books
https://ci.nii.ac.jp/books
NCID: https://ci.nii.ac.jp/ncid/BB13815234 : BB13815234