Silicon processing for the VLSI era cover : v. 1 v. 2

Silicon processing for the VLSI era cover : v. 1

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Note (General)：: vol. 1: Process technology. vol. 2: Process integrationIncludes bibliographies and indexes

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Material Type: 図書
ISBN: 0961672137
0961672145
Title: Silicon processing for the VLSI era
Volume: cover : v. 1
v. 2
Author/Editor: Stanley Wolf
Author Heading: Wolf, Stanley
https://ci.nii.ac.jp/author/DA04691118
Publication, Distribution, etc.: Lattice Press
Publication Date: c1986-<c1990 >
Publication Date (W3CDTF): 1986
Size: 25 cm
Place of Publication (Country Code): us
Text Language Code: en
Subject Heading: Integrated circuits -- Very large scale integration
Silicon
LCC: TK7874
NDC 8th ed.: 549.7
Target Audience: 一般
Note (General): vol. 1: Process technology. vol. 2: Process integration
Includes bibliographies and indexes
Related Material: The submicron mosfet
https://cir.nii.ac.jp/crid/1130282270517959296
Related Material (URI): https://ci.nii.ac.jp/ncid/BA21071769#entity
https://lccn.loc.gov/86081923
Data Provider (Database): 国立情報学研究所 : CiNii Research
Original Data Provider (Database): CiNii Books
https://ci.nii.ac.jp/books
NCID: https://ci.nii.ac.jp/ncid/BA21071769 : BA21071769
LC Control Number: 86081923
https://lccn.loc.gov/86081923