軟X線リソグラフィー用光源および光学系の開発

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Material Type: 図書
Title: 軟X線リソグラフィー用光源および光学系の開発
Title Transcription: ナンXセンリソグラフィーヨウコウゲンオヨビコウガクケイノカイハツ
Author/Editor: 研究代表者波岡武 [ほか著]
Author Heading: 波岡, 武ナミオカ, タケシ
https://ci.nii.ac.jp/author/DA00700090
Publication, Distribution, etc.: [出版者不明]
Publication Date: 1986.3
Publication Date (W3CDTF): 1986
Size: 26cm
Alternative Title: 昭和60年度科学研究費補助金(試験研究(2))研究成果報告書
Place of Publication (Country Code): ja
Text Language Code: ja
Target Audience: 一般
Note (General): 研究課題番号:5985007
Related Material: 科学研究費補助金(試験研究2)研究成果報告書
https://cir.nii.ac.jp/crid/1130282271170357632
Related Material (URI): https://ci.nii.ac.jp/ncid/BA8671333X#entity
Periodical Title: 科学研究費補助金(試験研究2)研究成果報告書
https://cir.nii.ac.jp/crid/1130282271170357632
Data Provider (Database): 国立情報学研究所 : CiNii Research
Original Data Provider (Database): CiNii Books
https://ci.nii.ac.jp/books
NCID: https://ci.nii.ac.jp/ncid/BA8671333X : BA8671333X