図書

Impurity diffusion and gettering in silicon : symposium held November 27-30, 1984, Boston, Massachusetts, U.S.A.

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Impurity diffusion and gettering in silicon : symposium held November 27-30, 1984, Boston, Massachusetts, U.S.A.

Material type
図書
Author
editors, Richard B. Fair, Charles W. Pearce, Jack Washburn
Publisher
Materials Research Society
Publication date
c1985
Material Format
Paper
Capacity, size, etc.
24 cm
NDC
549.8
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Notes on use

Note (General):

"Proceedings of the Symposium on Impurity Diffusion and Gettering in Semiconductors ... held as Symposium C at the Material's Research Society Meeting...

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Paper

Material Type
図書
ISBN
0931837014
Author/Editor
editors, Richard B. Fair, Charles W. Pearce, Jack Washburn
Publication, Distribution, etc.
Publication Date
c1985
Publication Date (W3CDTF)
1985
Size
24 cm
Place of Publication (Country Code)
us