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Bibliographic Record
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- Material Type
- 図書
- ISBN
- 081944782X
- Title
- Author/Editor
- Holger Becker, Peter Woias, chairs/editors ; sponsored ... by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International, SolidState Technology, [and] Sandia National Laboratories (USA)
- Author Heading
- Publication, Distribution, etc.
- Publication Date
- c2003
- Publication Date (W3CDTF)
- 2003
- Size
- 28 cm
- Alternative Title
- Microfluidics and bioMEMs