IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop : ASMC 95 proceedings, November 13-15, 1995, Cambridge, Massachusetts : soft. : case. : micro.

IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop : ASMC 95 proceedings, November 13-15, 1995, Cambridge, Massachusetts : soft.

Material type: 図書

Author: IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshopほか

Publisher: Additional copies of these proceedings may be purchased from: SEMI

Publication date: c1995

Material Format: Paper

Capacity, size, etc.: 28 cm

NDC: -

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Notes on use

Note (General)：: Includes bibliographical references"IEEE catalog number 95CH35811" -- T.p. verso"Theme - Semiconductor Manufacturing: Economic Solutions for the 21st ...

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Paper

Material Type: 図書
ISBN: 0780327136
0780327144
0780327152
Title: IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop : ASMC 95 proceedings, November 13-15, 1995, Cambridge, Massachusetts
Volume: : soft.
: case.
: micro.
Author Heading: IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop
https://ci.nii.ac.jp/author/DA05419489
Institute of Electrical and Electronics Engineers
https://ci.nii.ac.jp/author/DA00739948
Semiconductor Equipment and Materials International
https://ci.nii.ac.jp/author/DA0468648X
Publication, Distribution, etc.: Additional copies of these proceedings may be purchased from: SEMI
Publication Date: c1995
Publication Date (W3CDTF): 1995
Size: 28 cm
Alternative Title: 95CB35811
Place of Publication (Country Code): us
Text Language Code: en
Subject Heading: Electronic industries -- Congresses
Semiconductors -- Design and construction -- Congresses
Computer integrated manufacturing systems -- Congresses
LCC: TK7836
Target Audience: 一般
Note (General): Includes bibliographical references
"IEEE catalog number 95CH35811" -- T.p. verso
"Theme - Semiconductor Manufacturing: Economic Solutions for the 21st Century" -- T.p.
Related Material (URI): https://ci.nii.ac.jp/ncid/BA2793534X#entity
Data Provider (Database): 国立情報学研究所 : CiNii Research
Original Data Provider (Database): CiNii Books
https://ci.nii.ac.jp/books
NCID: https://ci.nii.ac.jp/ncid/BA2793534X : BA2793534X