図書

はじめての半導体リソグラフィ技術

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はじめての半導体リソグラフィ技術

Material type
図書
Author
岡崎信次, 鈴木章義, 上野巧著
Publisher
技術評論社
Publication date
2012.1
Material Format
Paper
Capacity, size, etc.
21cm
NDC
549.7
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工業調査会 2003年刊の改訂参考文献: 各章末

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Paper

Material Type
図書
ISBN
9784774149394
Title Transcription
ハジメテ ノ ハンドウタイ リソグラフィ ギジュツ
Author/Editor
岡崎信次, 鈴木章義, 上野巧著
Publication, Distribution, etc.
Publication Date
2012.1
Publication Date (W3CDTF)
2012
Size
21cm