Technical digest, MEMS 2002, ieee international conference, Las Vegas : the fifteenth IEEE International Conference on Micro Electro Mechanical Systems , Lasvegas, Nevada, USA, January 20-24, 2002

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Material Type: 図書
ISBN: 0780371852
Title: Technical digest, MEMS 2002, ieee international conference, Las Vegas : the fifteenth IEEE International Conference on Micro Electro Mechanical Systems , Lasvegas, Nevada, USA, January 20-24, 2002
Author/Editor: sponsored by IEEE and the Robotics and Automation Society
Author Heading: IEEE Robotics and Automation Society
https://ci.nii.ac.jp/author/DA04995713
IEEE Annual International Conference on Micro Electro Mechanical Systems
https://ci.nii.ac.jp/author/DA12459803
Publication, Distribution, etc.: IEEE Operations Center
Publication Date: c2002
Publication Date (W3CDTF): 2002
Size: 28 cm
Alternative Title: IEEE Micro Electro Mechanical Systems Conference technical digest 2002
02CH37266
Place of Publication (Country Code): us
Text Language Code: en
Target Audience: 一般
Note (General): "IEEE catalog number: 02CH37266" -- T. p.
Related Material (URI): https://ci.nii.ac.jp/ncid/BA56874318#entity
Data Provider (Database): 国立情報学研究所 : CiNii Research
Original Data Provider (Database): CiNii Books
https://ci.nii.ac.jp/books
NCID: https://ci.nii.ac.jp/ncid/BA56874318 : BA56874318