Ultraclean surface processing of silicon wafers : secrets of VLSI manufacturing : pbk

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Note (General)：: Revised, updated and enlarged translation of the original Japanese ed.: Silicon wafer hyomen no clean-ka gijutsuIncludes bibliographical references an...

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Material Type: 図書
ISBN: 9783642082726
Title: Ultraclean surface processing of silicon wafers : secrets of VLSI manufacturing
Volume: : pbk
Author/Editor: Takeshi Hattori (ed.)
Author Heading: 服部, 毅ハットリ, タケシ
Publication, Distribution, etc.: Springer
Publication Date: c2010
Publication Date (W3CDTF): 2010
Size: 24 cm
Place of Publication (Country Code): gw
Text Language Code: en
Subject Heading: Semiconductor wafers -- Cleaning
Surface preparation
Silicon -- Surfaces
Target Audience: 一般
Note (General): Revised, updated and enlarged translation of the original Japanese ed.: Silicon wafer hyomen no clean-ka gijutsu
Includes bibliographical references and index
Related Material (URI): https://ci.nii.ac.jp/ncid/BB05482668#entity
Data Provider (Database): 国立情報学研究所 : CiNii Research
Original Data Provider (Database): CiNii Books
https://ci.nii.ac.jp/books
NCID: https://ci.nii.ac.jp/ncid/BB05482668 : BB05482668