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図書

薄膜マイクロ構造機械的特性評価試験機の試作

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薄膜マイクロ構造機械的特性評価試験機の試作

Material type
図書
Author
駒井謙治郎研究代表
Publisher
[駒井謙治郎]
Publication date
2003
Material Format
Paper
Capacity, size, etc.
30cm
NDC
-
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Paper

Material Type
図書
Title Transcription
ハクマク マイクロ コウゾウ キカイテキ トクセイ ヒョウカ シケンキ ノ シサク
Author/Editor
駒井謙治郎研究代表
Publication, Distribution, etc.
Publication Date
2003
Publication Date (W3CDTF)
2003
Size
30cm
Alternative Title
平成13〜14年度科学研究費補助金基盤研究(B)(2)研究成果報告書