塩素・臭素系混合プラズマの気相および固体表面におけるプラズマ化学の解明と制御

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Material Type: 図書
Title: 塩素・臭素系混合プラズマの気相および固体表面におけるプラズマ化学の解明と制御
Title Transcription: エンソシュウソケイコンゴウプラズマノキソウオヨビコタイヒョウメンニオケルプラズマカガクノカイメイトセイギョ
Author/Editor: 研究代表者斧高一
Author Heading: 斧, 高一オノ, コウイチ
https://ci.nii.ac.jp/author/DA16869884
京都大学大学院工学研究科キョウトダイガクダイガクインコウガクケンキュウカ
https://ci.nii.ac.jp/author/DA12826609
Publication, Distribution, etc.: [斧高一]
Publication Date: 2007.5
Publication Date (W3CDTF): 2007
Size: 30cm
Alternative Title: 平成17年度～平成18年度科学研究費補助金(基盤研究(B))研究成果報告書 : (課題番号 17340172)
A study of plasma chemistry in the gas phase and on surfaces during plasma etching in chlorine-and bromine-containing plasmas
Place of Publication (Country Code): ja
Target Audience: 一般
Note (General): 京都大学大学院工学研究科
Related Material (URI): https://ci.nii.ac.jp/ncid/BB02006632#entity
Data Provider (Database): 国立情報学研究所 : CiNii Research
Original Data Provider (Database): CiNii Books
https://ci.nii.ac.jp/books
NCID: https://ci.nii.ac.jp/ncid/BB02006632 : BB02006632