Copper interconnects, new contact metallurgies, structures, and low-k interlevel dielectrics : proceedings of the internatioal symposium

Material type: 図書

Author: editor, G.S. Mathad ; assistant editors, B.C. Baker ... [et al.] ; sponsoring divisions, Dielectric Science and Technology, Electronics, Electrodeposition

Publisher: Electrochemical Society

Publication date: c2003

Material Format: Paper

Capacity, size, etc.: 24 cm

NDC: -

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Note (General)：: "... was held as part of the 202nd Meeting of the Electrochemical Society, Inc., in Salt Lake City, UT, October 20-24, 2002"--on prefIncludes bibliogr...

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Paper

Material Type: 図書
ISBN: 1566773792
Title: Copper interconnects, new contact metallurgies, structures, and low-k interlevel dielectrics : proceedings of the internatioal symposium
Author/Editor: editor, G.S. Mathad ; assistant editors, B.C. Baker ... [et al.] ; sponsoring divisions, Dielectric Science and Technology, Electronics, Electrodeposition
Author Heading: International Symposium on Copper Interconnects, New Contact Metallurgies/Structures, and Low-k Interlevel Dielectrics
Mathad, G. S.
https://ci.nii.ac.jp/author/DA03249537
Baker, B. C.
Electrochemical Society. Dielectric Science and Technology Division
https://ci.nii.ac.jp/author/DA06421624
Electrochemical Society. Electronics Division
https://ci.nii.ac.jp/author/DA0357072X
Electrochemical Society. Electrodeposition Division
https://ci.nii.ac.jp/author/DA06133470
Electrochemical Society. Meeting
https://ci.nii.ac.jp/author/DA03398898
Publication, Distribution, etc.: Electrochemical Society
Publication Date: c2003
Publication Date (W3CDTF): 2003
Size: 24 cm
Place of Publication (Country Code): us
Text Language Code: en
Target Audience: 一般
Note (General): "... was held as part of the 202nd Meeting of the Electrochemical Society, Inc., in Salt Lake City, UT, October 20-24, 2002"--on pref
Includes bibliographical references and indexes
Related Material: Proceedings
https://cir.nii.ac.jp/crid/1130282269273401728
Related Material (URI): https://ci.nii.ac.jp/ncid/BA62538202#entity
https://lccn.loc.gov/2003103319
Periodical Title: Proceedings
https://cir.nii.ac.jp/crid/1130282269273401728
Data Provider (Database): 国立情報学研究所 : CiNii Research
Original Data Provider (Database): CiNii Books
https://ci.nii.ac.jp/books
NCID: https://ci.nii.ac.jp/ncid/BA62538202 : BA62538202
LC Control Number: 2003103319
https://lccn.loc.gov/2003103319