Proceedings of the Fifth Symposium on Ion Sources and Ion-Assisted Technology ; Proceedings of International Workshop by Professional Group on Ion-Based Techniques for Film Formation : June 1st-5th 1981 = 第5回シンポジウム, 「イオン源とイオンを基礎とした応用技術」 ; および国際学術研究集会「イオンを基礎とした薄膜形成技術」に関するシンポジウム : 昭和56年6月1日(月)-6月5日(金)

Proceedings of the Fifth Symposium on Ion Sources and Ion-Assisted Technology ; Proceedings of International Workshop by Professional Group on Ion-Based Techniques for Film Formation : June 1st-5th 1981 = 第5回シンポジウム, 「イオン源とイオンを基礎とした応用技術」 ; および国際学術研究集会「イオンを基礎とした薄膜形成技術」に関するシンポジウム : 昭和56年6月1日(月)-6月5日(金)

Material type: 図書

Author: edited by Toshinori Takagi

Publisher: Research Group of Ion Engineering in Ion Beam Engineering Experimental Laboratory, Kyoto University, Professional Group of Electron Devices, Institute of Electrical Engineers of Japan

Publication date: [1982]

Material Format: Paper

Capacity, size, etc.: 30 cm

NDC: -

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Notes on use

Note (General)：: "ISAT'81"Includes references

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Paper

Material Type: 図書
Title: Proceedings of the Fifth Symposium on Ion Sources and Ion-Assisted Technology ; Proceedings of International Workshop by Professional Group on Ion-Based Techniques for Film Formation : June 1st-5th 1981 = 第5回シンポジウム, 「イオン源とイオンを基礎とした応用技術」 ; および国際学術研究集会「イオンを基礎とした薄膜形成技術」に関するシンポジウム : 昭和56年6月1日(月)-6月5日(金)
Author/Editor: edited by Toshinori Takagi
Author Heading: Symposium on Ion Sources and Ion-Assisted Technology
https://ci.nii.ac.jp/author/DA02226401
高木, 俊宜タカギ, トシノリ
https://ci.nii.ac.jp/author/DA08995089
イオン工学懇談会イオンコウガクコンダンカイ
https://ci.nii.ac.jp/author/DA0222606X
電気学会電子デバイス技術委員会デンキガッカイデンシデバイスギジュツイインカイ
https://ci.nii.ac.jp/author/DA02226208
International Workshop by Professional Group Ion-based Techniques for Film Formation
https://ci.nii.ac.jp/author/DA02227798
Publication, Distribution, etc.: Research Group of Ion Engineering in Ion Beam Engineering Experimental Laboratory, Kyoto University, Professional Group of Electron Devices, Institute of Electrical Engineers of Japan
Publication Date: [1982]
Publication Date (W3CDTF): 1982
Size: 30 cm
Alternative Title: ISIAT'81
Place of Publication (Country Code): ja
Text Language Code: en
NDLC: MC241
PA181
Target Audience: 一般
Note (General): "ISAT'81"
Includes references
Related Material (URI): https://ci.nii.ac.jp/ncid/BA03698501#entity
Data Provider (Database): 国立情報学研究所 : CiNii Research
Original Data Provider (Database): CiNii Books
https://ci.nii.ac.jp/books
NCID: https://ci.nii.ac.jp/ncid/BA03698501 : BA03698501