Computational modeling in semiconductor processing

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Material Type: 図書
ISBN: 0890067074
Title: Computational modeling in semiconductor processing
Author/Editor: M. Meyyappan, editor
Author Heading: Meyyappan, M.
Publication, Distribution, etc.: Artech House
Publication Date: c1995
Publication Date (W3CDTF): 1995
Size: 24 cm
Place of Publication (Country Code): us
Text Language Code: en
Subject Heading: Semiconductors -- Design and construction -- Data processing
Process control -- Mathematical models
Semiconductor industry
LCC: TK7871.85
Target Audience: 一般
Note (General): Includes bibliographical references and index
Related Material: The Artech House materials science library
https://cir.nii.ac.jp/crid/1130282270426257664
Related Material (URI): https://ci.nii.ac.jp/ncid/BA24671751#entity
https://lccn.loc.gov/94017563
Periodical Title: The Artech House materials science library
https://cir.nii.ac.jp/crid/1130282270426257664
Data Provider (Database): 国立情報学研究所 : CiNii Research
Original Data Provider (Database): CiNii Books
https://ci.nii.ac.jp/books
NCID: https://ci.nii.ac.jp/ncid/BA24671751 : BA24671751
LC Control Number: 94017563
https://lccn.loc.gov/94017563