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Bibliographic Record
You can check the details of this material, its authority (keywords that refer to materials on the same subject, author's name, etc.), etc.
- Material Type
- 図書
- Title Transcription
- センイ コウブンシ ザイリョウ ノ スパッタ エッチング ニ ヨル ヒョウメン カイシツ ト セッチャク エノ オウヨウ
- Author/Editor
- 具剛[著]
- Author Heading
- 具, 剛 クウ, カン
- Publication, Distribution, etc.
- Publication Date
- 1993
- Publication Date (W3CDTF)
- 1993
- Size
- 30cm
- Place of Publication (Country Code)
- ja