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Bibliographic Record
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- Material Type
- 図書
- Title Transcription
- トンネル デンリュウ キョリ センサ オ シュウセキカ シタ シリコン マイクロ ストラクチャ ニ ヨル ビショウ クドウ ソウチ
- Author/Editor
- 研究代表者藤田博之
- Author Heading
- 藤田, 博之 フジタ, ヒロユキ
- Publication, Distribution, etc.
- Publication Date
- 1991
- Publication Date (W3CDTF)
- 1991
- Size
- 27cm
- Place of Publication (Country Code)
- ja