Ultra clean processing of silicon surfaces 2000 : proceedings of the Fifth International Symposium on Ultra Clean Processing of Silicon Surfaces (UCPSS 2000), held in Ostend, Belgium, September 18-20, 2000

Ultra clean processing of silicon surfaces 2000 : proceedings of the Fifth International Symposium on Ultra Clean Processing of Silicon Surfaces (UCPSS 2000), held in Ostend, Belgium, September 18-20, 2000

Material type: 図書

Author: editors, Marc Heyns, Paul Mertens and Marc Meuris

Publisher: Scitec Publications

Publication date: c2001

Material Format: Paper

Capacity, size, etc.: 25 cm

NDC: -

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Notes on use

Note (General)：: Includes bibliographical references and indexes

Related materials as well as pre- and post-revision versions

Diffusion and defect data : solid state data

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Paper

Material Type: 図書
ISBN: 3908450578
Title: Ultra clean processing of silicon surfaces 2000 : proceedings of the Fifth International Symposium on Ultra Clean Processing of Silicon Surfaces (UCPSS 2000), held in Ostend, Belgium, September 18-20, 2000
Author/Editor: editors, Marc Heyns, Paul Mertens and Marc Meuris
Author Heading: International Symposium on Ultra Clean Processing of Silicon Surfaces (UCPSS)
Heyns, Marc
Mertens, Paul
Meuris, Marc
Publication, Distribution, etc.: Scitec Publications
Publication Date: c2001
Publication Date (W3CDTF): 2001
Size: 25 cm
Place of Publication (Country Code): sz
Text Language Code: en
Target Audience: 一般
Note (General): Includes bibliographical references and indexes
Related Material: Diffusion and defect data : solid state data
https://cir.nii.ac.jp/crid/1130000794054585088
Related Material (URI): https://ci.nii.ac.jp/ncid/BA7192768X#entity
Periodical Title: Diffusion and defect data : solid state data
https://cir.nii.ac.jp/crid/1130000794054585088
Data Provider (Database): 国立情報学研究所 : CiNii Research
Original Data Provider (Database): CiNii Books
https://ci.nii.ac.jp/books
NCID: https://ci.nii.ac.jp/ncid/BA7192768X : BA7192768X