高速・高均一デジタルCVDを用いたULSI用高機能性薄膜の作製

Notes on use

Related materials as well as pre- and post-revision versions

Search by Bookstore

This page shows libraries in Japan other than the National Diet Library that hold the material.

Please contact your local library for information on how to use materials or whether it is possible to request materials from the holding libraries.

other

CiNii Research
Search Service
Paper
You can check the holdings of institutions and databases with which CiNii Research is linked at the site of CiNii Research.
Check the holdings of this book

You can check the details of this material, its authority (keywords that refer to materials on the same subject, author's name, etc.), etc.

Material Type: 図書
Title: 高速・高均一デジタルCVDを用いたULSI用高機能性薄膜の作製
Title Transcription: コウソク・コウキンイツデジタルCVD ヲモチイタ ULSI ヨウコウキノウセイウスマクノサクセイ
Author/Editor: 研究代表者堀池靖浩
Author Heading: 堀池, 靖浩ホリイケ, ヤスヒロ
https://ci.nii.ac.jp/author/DA09556390
Publication, Distribution, etc.: [堀池靖浩]
Publication Date: [1997.2]
Publication Date (W3CDTF): 1997
Size: 30cm
Alternative Title: 平成7年度科学研究費補助金(試験研究B) 研究成果報告書
Place of Publication (Country Code): ja
Text Language Code: ja
Target Audience: 一般
Note (General): 課題番号:05555089
Related Material: 科学研究費補助金(試験研究B)研究成果報告書
https://cir.nii.ac.jp/crid/1130000794446696704
Related Material (URI): https://ci.nii.ac.jp/ncid/BA71052788#entity
Periodical Title: 科学研究費補助金(試験研究B)研究成果報告書
https://cir.nii.ac.jp/crid/1130000794446696704
Data Provider (Database): 国立情報学研究所 : CiNii Research
Original Data Provider (Database): CiNii Books
https://ci.nii.ac.jp/books
NCID: https://ci.nii.ac.jp/ncid/BA71052788 : BA71052788