Silicon nitride and silicon dioxide thin insulating films, proceedings of the fifth International Symposium

Material type: 図書

Author: editors, K. B. Sundaram ... [et al.] ; Dielectric Science and Technology and Electronics Divisions, and High Temperature Materials Divisions [of the Electrochemical Society]

Publisher: Electrochemical Society

Publication date: c1999

Material Format: Paper

Capacity, size, etc.: 23 cm

NDC: -

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Note (General)：: Includes bibliographic references and indexes

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Paper

Material Type: 図書
ISBN: 1566772281
Title: Silicon nitride and silicon dioxide thin insulating films, proceedings of the fifth International Symposium
Author/Editor: editors, K. B. Sundaram ... [et al.] ; Dielectric Science and Technology and Electronics Divisions, and High Temperature Materials Divisions [of the Electrochemical Society]
Author Heading: Symposium on Silicon Nitride and Silicon Dioxide Thin Insulating Films
https://ci.nii.ac.jp/author/DA05098760
Sundaram, K. B.
Electrochemical Society. Dielectric Science and Technology Division
https://ci.nii.ac.jp/author/DA06421624
Electrochemical Society. Electronics Division
https://ci.nii.ac.jp/author/DA0357072X
Electrochemical Society. High Temperature Materials Division
https://ci.nii.ac.jp/author/DA00693133
Publication, Distribution, etc.: Electrochemical Society
Publication Date: c1999
Publication Date (W3CDTF): 1999
Size: 23 cm
Place of Publication (Country Code): us
Text Language Code: en
Subject Heading: Thin film devices -- Congresses
Silicon nitride -- Congresses
Silicon dioxide -- Congresses
Electric insulators and insulation -- Thin films -- Congresses
LCC: TK7872.T55
Target Audience: 一般
Note (General): Includes bibliographic references and indexes
Related Material: Proceedings
https://cir.nii.ac.jp/crid/1130282269273401728
Related Material (URI): https://ci.nii.ac.jp/ncid/BA4897493X#entity
https://lccn.loc.gov/99066175
Periodical Title: Proceedings
https://cir.nii.ac.jp/crid/1130282269273401728
Data Provider (Database): 国立情報学研究所 : CiNii Research
Original Data Provider (Database): CiNii Books
https://ci.nii.ac.jp/books
NCID: https://ci.nii.ac.jp/ncid/BA4897493X : BA4897493X
LC Control Number: 99066175
https://lccn.loc.gov/99066175