Tungsten and other advanced metals for ULSI applications 1990 : proceedings of the 1990 workshop held October 22-24, 1990, Dallas, Texas, U.S.A.

Author: sponsored by Continuing Education in Engineering, University Extension, University of Calfornia, Berkeley, and Texas Instrumets, Inc., Dallas, Texas ; editors: Gregory C. Smith, Roc Blumenthal ; associate editors: Carol M. McConica ... [et al.]

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Material Type: 図書
ISBN: 1558991123
Title: Tungsten and other advanced metals for ULSI applications 1990 : proceedings of the 1990 workshop held October 22-24, 1990, Dallas, Texas, U.S.A.
Author/Editor: sponsored by Continuing Education in Engineering, University Extension, University of Calfornia, Berkeley, and Texas Instrumets, Inc., Dallas, Texas ; editors: Gregory C. Smith, Roc Blumenthal ; associate editors: Carol M. McConica ... [et al.]
Author Heading: Smith, Gregory C.
Blumenthal, Roc
McConica, Carol C.
Workshop on Tungsten and Other Advanced Metals for ULSI Applications
Materials Research Society
Publication, Distribution, etc.: Materials Research Society
Publication Date: c1991
Publication Date (W3CDTF): 1990
Size: 24 cm
Place of Publication (Country Code): us
Text Language Code: en
Target Audience: 一般
Note (General): Includes bibliography and index
Related Material (URI): https://ci.nii.ac.jp/ncid/BA12410604#entity
Data Provider (Database): 国立情報学研究所 : CiNii Research
Original Data Provider (Database): CiNii Books
https://ci.nii.ac.jp/books
NCID: https://ci.nii.ac.jp/ncid/BA12410604 : BA12410604