電力用デバイス絶縁放熱に適した窒化アルミニウム膜生成真空アーク蒸着装置の試作

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Material Type: 図書
Title: 電力用デバイス絶縁放熱に適した窒化アルミニウム膜生成真空アーク蒸着装置の試作
Title Transcription: デンリョクヨウデバイスゼツエンホウネツニテキシタチッカアルミニウムマクセイセイシンクウアークジョウチャクソウチノシサク
Author/Editor: 榊原建樹研究代表
Author Heading: 榊原, 建樹サカキバラ, タテキ
https://ci.nii.ac.jp/author/DA10252600
Publication, Distribution, etc.: 榊原建樹
Publication Date: 1999.3
Publication Date (W3CDTF): 1999
Size: 30cm
Place of Publication (Country Code): ja
Target Audience: 一般
Note (General): 課題番号: 08555075
Related Material: 科学研究費補助金(基盤研究(A)(1))研究成果報告書
https://cir.nii.ac.jp/crid/1130282269667935488
Related Material (URI): https://ci.nii.ac.jp/ncid/BA87289786#entity
Periodical Title: 科学研究費補助金(基盤研究(A)(1))研究成果報告書
https://cir.nii.ac.jp/crid/1130282269667935488
Data Provider (Database): 国立情報学研究所 : CiNii Research
Original Data Provider (Database): CiNii Books
https://ci.nii.ac.jp/books
NCID: https://ci.nii.ac.jp/ncid/BA87289786 : BA87289786