High resolution focused ion beams : FIB and its applications : the physics of liquid metal ion sources and ion optics and their application to focused ion beam technology

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Material Type: 図書
ISBN: 030647350X
Title: High resolution focused ion beams : FIB and its applications : the physics of liquid metal ion sources and ion optics and their application to focused ion beam technology
Author/Editor: Jon Orloff, Mark Utlaut and Lynwood Swanson
Author Heading: Orloff, Jon
https://ci.nii.ac.jp/author/DA11136671
Utlaut, Mark William
Swanson, Lynwood W.
Publication, Distribution, etc.: Kluwer Academic/Plenum Publishers
Publication Date: c2003
Publication Date (W3CDTF): 2003
Size: 26 cm
Place of Publication (Country Code): us
Text Language Code: en
Subject Heading: Ion bombardment -- Industrial applications
LCC: QC702.7.B65
Target Audience: 一般
Note (General): Includes bibliographical references and index
Related Material (URI): https://ci.nii.ac.jp/ncid/BA59579416#entity
https://lccn.loc.gov/2002028661
Data Provider (Database): 国立情報学研究所 : CiNii Research
Original Data Provider (Database): CiNii Books
https://ci.nii.ac.jp/books
NCID: https://ci.nii.ac.jp/ncid/BA59579416 : BA59579416
LC Control Number: 2002028661
https://lccn.loc.gov/2002028661