図書

次世代シリコン基板中の微小欠陥の光学的非破壊検出法の研究

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次世代シリコン基板中の微小欠陥の光学的非破壊検出法の研究

Material type
図書
Author
研究代表者山田正良
Publisher
[山田正良]
Publication date
2002
Material Format
Paper
Capacity, size, etc.
30cm
NDC
-
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Paper

Material Type
図書
Title Transcription
ジセダイ シリコン キバンチュウ ノ ビショウ ケッカン ノ コウガクテキ ヒハカイ ケンシュツホウ ノ ケンキュウ
Author/Editor
研究代表者山田正良
Publication, Distribution, etc.
Publication Date
2002
Publication Date (W3CDTF)
2002
Size
30cm
Alternative Title
平成10-13年度科学研究費補助金(基盤研究(B)(2))研究成果報告書(研究課題番号10450008)