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図書

ナノポーラス/有機構造低誘電率膜と金属電極の界面制御

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ナノポーラス/有機構造低誘電率膜と金属電極の界面制御

Material type
図書
Author
研究代表者 吉川公麿
Publisher
広島大学ナノデバイス・システム研究センター
Publication date
2002.10
Material Format
Paper
Capacity, size, etc.
30cm
NDC
-
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課題番号: 11450126

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科学研究費補助金(基盤研究(B)(2))研究成果報告書Leave the NDL website.

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Paper

Material Type
図書
Title Transcription
ナノ ポーラス ユウキ コウゾウ テイユウデンリツマク ト キンゾク デンキョク ノ カイメン セイギョ
Author/Editor
研究代表者 吉川公麿
Author Heading
吉川, 公麿 キツカワ, タカマロ
Publication Date
2002.10
Publication Date (W3CDTF)
2002
Size
30cm
Place of Publication (Country Code)
ja