走査ビーム型顕微フォトルミネッセンスによる半導体中不純物・欠陥の高空間分解測定

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Material Type: 図書
Title: 走査ビーム型顕微フォトルミネッセンスによる半導体中不純物・欠陥の高空間分解測定
Title Transcription: ソウサビームガタケンビフォトルミネッセンスニヨルハンドウタイチュウフジュンブツケッカンノコウクウカンブンカイソクテイ
Author/Editor: 研究代表者田島道夫 ; 研究分担者藁品正敏 [ほか]
Author Heading: 田島, 道夫タジマ, ミチオ
https://ci.nii.ac.jp/author/DA0884048X
藁品, 正敏ワラシナ, マサトシ
Publication, Distribution, etc.: [田島道夫]
Publication Date: 1996.9
Publication Date (W3CDTF): 1996
Size: 30 cm
Place of Publication (Country Code): ja
Text Language Code: ja
Target Audience: 一般
Note (General): 平成7年度科学研究助成金 (試験研究(B)) 研究成果報告書
研究課題番号05555005
Related Material (URI): https://ci.nii.ac.jp/ncid/BA54075517#entity
Data Provider (Database): 国立情報学研究所 : CiNii Research
Original Data Provider (Database): CiNii Books
https://ci.nii.ac.jp/books
NCID: https://ci.nii.ac.jp/ncid/BA54075517 : BA54075517