Microfabricated Systems and MEMS V : proceedings of the International Symposium

Material type: 図書

Author: editors, P.J. Hesketh ... [et al.]

Publisher: Electrochemical Society

Publication date: c2000

Material Format: Paper

Capacity, size, etc.: 24 cm

NDC: -

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Note (General)：: "Sensor, Dielectric Science & Technology, and Electronics Divisions"--on T.p"... held in Phoenix, October 2000. This symposium has had a name change t...

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Paper

Material Type: 図書
ISBN: 1566772869
Title: Microfabricated Systems and MEMS V : proceedings of the International Symposium
Author/Editor: editors, P.J. Hesketh ... [et al.]
Author Heading: Microfabricated Systems and MEMS
Hesketh, P. J.
Electrochemical Society. Sensor Division
https://ci.nii.ac.jp/author/DA09951067
Electrochemical Society. Dielectric Science and Technology Division
https://ci.nii.ac.jp/author/DA06421624
Electrochemical Society. Electronics Division
https://ci.nii.ac.jp/author/DA0357072X
Publication, Distribution, etc.: Electrochemical Society
Publication Date: c2000
Publication Date (W3CDTF): 2000
Size: 24 cm
Place of Publication (Country Code): us
Text Language Code: en
Subject Heading: Microelectronics -- Congresses
Microstructure -- Congresses
Micromechanics -- Congresses
LCC: TK7874
Target Audience: 一般
Note (General): "Sensor, Dielectric Science & Technology, and Electronics Divisions"--on T.p
"... held in Phoenix, October 2000. This symposium has had a name change to represent the diversity of subject matter involved in the conference sessions"--on pref
Includes bibliographical references and indexes
Related Material: Proceedings
https://cir.nii.ac.jp/crid/1130282269273401728
Related Material (URI): https://ci.nii.ac.jp/ncid/BA54507280#entity
https://lccn.loc.gov/00107659
Periodical Title: Proceedings
https://cir.nii.ac.jp/crid/1130282269273401728
Data Provider (Database): 国立情報学研究所 : CiNii Research
Original Data Provider (Database): CiNii Books
https://ci.nii.ac.jp/books
NCID: https://ci.nii.ac.jp/ncid/BA54507280 : BA54507280
LC Control Number: 00107659
https://lccn.loc.gov/00107659