ナノ構造光デバイス作製のためのAFM・電子ビーム結合リソグラフィ技術の開発

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Material Type: 図書
Title: ナノ構造光デバイス作製のためのAFM・電子ビーム結合リソグラフィ技術の開発
Title Transcription: ナノコウゾウヒカリデバイスサクセイノタメノ AFM デンシビームケツゴウリソグラフィギジュツノカイハツ
Author/Editor: 末宗幾夫研究代表
Author Heading: 末宗, 幾夫スエムネ, イクオ
https://ci.nii.ac.jp/author/DA18268659
Publication, Distribution, etc.: [北海道大学電子科学研究所]
Publication Date: 2001.3
Publication Date (W3CDTF): 2001
Size: 30cm
Place of Publication (Country Code): ja
Target Audience: 一般
Note (General): 研究課題番号:10555097
Related Material: 科学研究費補助金(基盤研究(B)(2))研究成果報告書
https://cir.nii.ac.jp/crid/1130000796573175552
Related Material (URI): https://ci.nii.ac.jp/ncid/BA52177469#entity
Periodical Title: 科学研究費補助金(基盤研究(B)(2))研究成果報告書
https://cir.nii.ac.jp/crid/1130000796573175552
Data Provider (Database): 国立情報学研究所 : CiNii Research
Original Data Provider (Database): CiNii Books
https://ci.nii.ac.jp/books
NCID: https://ci.nii.ac.jp/ncid/BA52177469 : BA52177469