1997 2nd International Symposium on Plasma Process-Induced Damage : 13-14 May 1997, Monterey, California, USA : softbound : microfiche

1997 2nd International Symposium on Plasma Process-Induced Damage : 13-14 May 1997, Monterey, California, USA : softbound

Material type: 図書

Author: editors, Kim P. Cheung, Moritaka Nakamura, and Calvin T. Gabriel ; technical co-sponsors, IEEE/Electron Devices Society, American Vacuum Society, Japanese Society of Applied Physics

Publisher: Northern California Chapter of the American Vacuum Society

Publication date: c1997

Material Format: Paper

Capacity, size, etc.: 28 cm

NDC: -

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Notes on use

Note (General)：: "IEEE catalog no. 97TH8265"--T.p. versoIncludes bibliographical references and index

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Paper

Material Type: 図書
ISBN: 0965157717
0780338227
Title: 1997 2nd International Symposium on Plasma Process-Induced Damage : 13-14 May 1997, Monterey, California, USA
Volume: : softbound
: microfiche
Author/Editor: editors, Kim P. Cheung, Moritaka Nakamura, and Calvin T. Gabriel ; technical co-sponsors, IEEE/Electron Devices Society, American Vacuum Society, Japanese Society of Applied Physics
Author Heading: International Symposium on Plasma Process-Induced Damage (2nd : 1997 : Monterey, Calif.)
Cheung, Kin P.
Nakamura, Moritaka
Gabriel, Calvin T.
https://ci.nii.ac.jp/author/DA10596199
IEEE Electron Devices Society
https://ci.nii.ac.jp/author/DA01257512
American Vacuum Society
応用物理学会オウヨウブツリガッカイ
https://ci.nii.ac.jp/author/DA00633233
Publication, Distribution, etc.: Northern California Chapter of the American Vacuum Society
Publication Date: c1997
Publication Date (W3CDTF): 1997
Size: 28 cm
Alternative Title: P2ID
2nd International Symposium on Plasma Process-Induced Damage
Place of Publication (Country Code): us
Text Language Code: en
Subject Heading: Semiconductor wafers -- Defects -- Congresses
Semiconductors -- Effect of radiation on -- Congresses
Plasma etching -- Congresses
LCC: TK7871.85
Target Audience: 一般
Note (General): "IEEE catalog no. 97TH8265"--T.p. verso
Includes bibliographical references and index
Related Material (URI): https://ci.nii.ac.jp/ncid/BA41124824#entity
https://lccn.loc.gov/97065930
Data Provider (Database): 国立情報学研究所 : CiNii Research
Original Data Provider (Database): CiNii Books
https://ci.nii.ac.jp/books
NCID: https://ci.nii.ac.jp/ncid/BA41124824 : BA41124824
LC Control Number: 97065930
https://lccn.loc.gov/97065930