Study on fabrication of functional thin films by plasma processing

Notes on use

Note (General)：: Thesis (Ph.D.)--Nagoya University. Graduate School of Engineering, 2002Kind of academic degree: 博士(工学)Date degree granted: 2002-03-25...

Search by Bookstore

This page shows libraries in Japan other than the National Diet Library that hold the material.

Please contact your local library for information on how to use materials or whether it is possible to request materials from the holding libraries.

other

CiNii Research
Search Service
Paper
You can check the holdings of institutions and databases with which CiNii Research is linked at the site of CiNii Research.
Check the holdings of this book

You can check the details of this material, its authority (keywords that refer to materials on the same subject, author's name, etc.), etc.

Material Type: 図書
Title: Study on fabrication of functional thin films by plasma processing
Author/Editor: Masahito Ban
Author Heading: 伴, 雅人バン, マサヒト
Publication, Distribution, etc.: [s.n.]
Publication Date: [2002]
Publication Date (W3CDTF): 2002
Size: 30 cm
Alternative Title: プラズマプロセスによる機能性薄膜の作製に関する研究
Text Language Code: en
Target Audience: 一般
Note (General): Thesis (Ph.D.)--Nagoya University. Graduate School of Engineering, 2002
Kind of academic degree: 博士(工学)
Date degree granted: 2002-03-25
Report number: 乙第6035号
Related Material (URI): https://ci.nii.ac.jp/ncid/BB14402207#entity
Data Provider (Database): 国立情報学研究所 : CiNii Research
Original Data Provider (Database): CiNii Books
https://ci.nii.ac.jp/books
NCID: https://ci.nii.ac.jp/ncid/BB14402207 : BB14402207