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図書

シリコン・マイクロアームの運動と制御に関する研究

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シリコン・マイクロアームの運動と制御に関する研究

Material type
図書
Author
研究代表者下山勲
Publisher
下山勲
Publication date
1994.3
Material Format
Paper
Capacity, size, etc.
30cm
NDC
-
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Notes on use

Note (General):

平成4年度科学研究費補助金(一般研究C)研究成果報告書

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Paper

Material Type
図書
Title Transcription
シリコン マイクロアーム ノ ウンドウ ト セイギョ ニカンスル ケンキュウ
Author/Editor
研究代表者下山勲
Publication, Distribution, etc.
Publication Date
1994.3
Publication Date (W3CDTF)
1994
Size
30cm
Place of Publication (Country Code)
ja