図書

Surface scattering and diffraction for advanced metrology II : 9 July 2002 Seattle, Washington, USA

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Surface scattering and diffraction for advanced metrology II : 9 July 2002 Seattle, Washington, USA

Material type
図書
Author
Zu-Han Gu, Alexei A. Maradudin, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organizations the Boeing Company (USA) ... [et al.]
Publisher
SPIE
Publication date
c2002
Material Format
Paper
Capacity, size, etc.
28 cm
NDC
-
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Includes index

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Paper

Material Type
図書
ISBN
0819445479
Author/Editor
Zu-Han Gu, Alexei A. Maradudin, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organizations the Boeing Company (USA) ... [et al.]
Publication, Distribution, etc.
Publication Date
c2002
Publication Date (W3CDTF)
2002
Size
28 cm
Place of Publication (Country Code)
us