Behaviour of ions in an RF plasma

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Note (General)：: Thesis (Ph.D.)--Nagoya University, 1971Kind of academic degree: 工学博士Date degree granted: 1971-06-14...

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Material Type: 図書
Title: Behaviour of ions in an RF plasma
Author/Editor: Yukio Okamoto
Author Heading: 岡本, 幸雄オカモト, ユキオ
Publication, Distribution, etc.: [s.n.]
Publication Date: [1971]
Publication Date (W3CDTF): 1971
Size: 30 cm
Alternative Title: 高周波プラズマ中のイオンの挙動
Text Language Code: en
Target Audience: 一般
Note (General): Thesis (Ph.D.)--Nagoya University, 1971
Kind of academic degree: 工学博士
Date degree granted: 1971-06-14
Report number: 甲第655号
Related Material (URI): https://ci.nii.ac.jp/ncid/BB1565565X#entity
Data Provider (Database): 国立情報学研究所 : CiNii Research
Original Data Provider (Database): CiNii Books
https://ci.nii.ac.jp/books
NCID: https://ci.nii.ac.jp/ncid/BB1565565X : BB1565565X