IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop : ASMC '93 proceedings, October 18-19, 1993, Boston, Massachusetts : soft. : case. : micro.

IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop : ASMC '93 proceedings, October 18-19, 1993, Boston, Massachusetts : soft.

Material type: 図書

Author: IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshopほか

Publisher: Additional copies of these proceedings may be purchased from: SEMI

Publication date: c1993

Material Format: Paper

Capacity, size, etc.: 28 cm

NDC: -

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Notes on use

Note (General)：: Includes bibliographical references"IEEE catalog number 93CH3337-3"--T.p. verso

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Paper

Material Type: 図書
ISBN: 0780313666
0780313674
0780313682
Title: IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop : ASMC '93 proceedings, October 18-19, 1993, Boston, Massachusetts
Volume: : soft.
: case.
: micro.
Author Heading: IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop
https://ci.nii.ac.jp/author/DA05419489
Institute of Electrical and Electronics Engineers
Semiconductor Equipment and Materials International
Publication, Distribution, etc.: Additional copies of these proceedings may be purchased from: SEMI
Publication Date: c1993
Publication Date (W3CDTF): 1993
Size: 28 cm
Alternative Title: 93CH33373
Place of Publication (Country Code): us
Text Language Code: en
Subject Heading: Electronic industries -- Congresses
Semiconductors -- Design and construction -- Congresses
Computer integrated manufacturing systems -- Congresses
LCC: TK7836
Target Audience: 一般
Note (General): Includes bibliographical references
"IEEE catalog number 93CH3337-3"--T.p. verso
Related Material (URI): https://ci.nii.ac.jp/ncid/BA21363345#entity
https://lccn.loc.gov/93078878
Data Provider (Database): 国立情報学研究所 : CiNii Research
Original Data Provider (Database): CiNii Books
https://ci.nii.ac.jp/books
NCID: https://ci.nii.ac.jp/ncid/BA21363345 : BA21363345
LC Control Number: 93078878
https://lccn.loc.gov/93078878