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図書

IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop : ASMC '94 proceedings, November 14-16, 1994, Cambridge, Massachusetts : soft. : case. : micro.

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IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop : ASMC '94 proceedings, November 14-16, 1994, Cambridge, Massachusetts : soft.

Material type
図書
Author
IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshopほか
Publisher
Additional copies of these proceedings may be purchased from: SEMI
Publication date
c1994
Material Format
Paper
Capacity, size, etc.
28 cm
NDC
-
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Notes on use

Note (General):

Includes bibliographical references"IEEE catalog number 94CH3475-1"--T.p. verso"Theme - Manufacturing Excellence : A Global Challenge"

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Paper

Material Type
図書
ISBN
0780320530
0780320549
0780320557
Volume
: soft.
: case.
: micro.
Publication Date
c1994
Publication Date (W3CDTF)
1994
Size
28 cm
Alternative Title
94CH3475-1