EMLC 2006 : 22nd European Mask and Lithography Conference : 23-26 January 2006, Dresden, Germany

Material type: 図書

Author: Uwe F.W. Behringer, chair/editor ; organized by VDE/VDI GMM--the Society for Microelectronics, Micro- and Precision Engineering (Germany) ; cooperating organizations, BACUS--the international technical group of SPIE dedicated to the advancement of photomask technology ... [et al.]

Publisher: SPIE

Publication date: c2006

Material Format: Paper

Capacity, size, etc.: 28 cm

NDC: -

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Note (General)：: Includes bibliographical references and author index

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Paper

Material Type: 図書
ISBN: 0819463566
Title: EMLC 2006 : 22nd European Mask and Lithography Conference : 23-26 January 2006, Dresden, Germany
Author/Editor: Uwe F.W. Behringer, chair/editor ; organized by VDE/VDI GMM--the Society for Microelectronics, Micro- and Precision Engineering (Germany) ; cooperating organizations, BACUS--the international technical group of SPIE dedicated to the advancement of photomask technology ... [et al.]
Author Heading: European Mask and Lithography Conference
Behringer, Uwe F. W.
VDE/VDI-Gesellschaft für Mikroelektronik, Mikro- und Feinwerktechnik
BACUS (Technical group)
https://ci.nii.ac.jp/author/DA08910530
Society of Photo-optical Instrumentation Engineers
https://ci.nii.ac.jp/author/DA00848546
Publication, Distribution, etc.: SPIE
Publication Date: c2006
Publication Date (W3CDTF): 2006
Size: 28 cm
Place of Publication (Country Code): us
Text Language Code: en
Subject Heading: Integrated circuits -- Masks -- Congresses
Microlithography -- Congresses
LCC: TK7872.M3
Target Audience: 一般
Note (General): Includes bibliographical references and author index
Related Material: Proceedings
https://cir.nii.ac.jp/crid/1130282269217551104
Related Material (URI): https://ci.nii.ac.jp/ncid/BA85710449#entity
https://lccn.loc.gov/2006285647
Periodical Title: Proceedings
https://cir.nii.ac.jp/crid/1130282269217551104
Data Provider (Database): 国立情報学研究所 : CiNii Research
Original Data Provider (Database): CiNii Books
https://ci.nii.ac.jp/books
NCID: https://ci.nii.ac.jp/ncid/BA85710449 : BA85710449
LC Control Number: 2006285647
https://lccn.loc.gov/2006285647