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High purity silicon VII : proceedings of the international symposium

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High purity silicon VII : proceedings of the international symposium

Material type
図書
Author
editors C.L. Claeys ... [et al.] ; sponsoring division: Electronics
Publisher
Electrochemical Society
Publication date
c2002
Material Format
Paper
Capacity, size, etc.
24 cm
NDC
-
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"... held in Salt Lake City, Utah at the 202nd Meeting of the Electrochemical Society, October 20-25, 2002"--on prefIncludes bibliographical reference...

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Paper

Material Type
図書
ISBN
156677344X
Author/Editor
editors C.L. Claeys ... [et al.] ; sponsoring division: Electronics
Publication, Distribution, etc.
Publication Date
c2002
Publication Date (W3CDTF)
2002
Size
24 cm
Place of Publication (Country Code)
us