低周波プラズマCVDによる集積回路配線の拡散バリア材としてのTiN膜低温形成

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Material Type: 図書
Title: 低周波プラズマCVDによる集積回路配線の拡散バリア材としてのTiN膜低温形成
Title Transcription: テイシュウハプラズマ CVD ニヨルシュウセキカイロハイセンノカクサンバリアザイトシテノ TiNマクテイオンケイセイ
Author/Editor: 下妻光夫研究代表
Author Heading: 下妻, 光夫シモズマ, ミツオ
https://ci.nii.ac.jp/author/DA18295527
Publication, Distribution, etc.: [北海道大学医療技術短期大学部]
Publication Date: 2000.3
Publication Date (W3CDTF): 2000
Size: 30cm
Place of Publication (Country Code): ja
Text Language Code: en
Target Audience: 一般
Related Material: 科学研究費補助金基盤研究(C)(2)研究成果報告書
https://cir.nii.ac.jp/crid/1130282272641935488
Related Material (URI): https://ci.nii.ac.jp/ncid/BA47879591#entity
Periodical Title: 科学研究費補助金基盤研究(C)(2)研究成果報告書
https://cir.nii.ac.jp/crid/1130282272641935488
Data Provider (Database): 国立情報学研究所 : CiNii Research
Original Data Provider (Database): CiNii Books
https://ci.nii.ac.jp/books
NCID: https://ci.nii.ac.jp/ncid/BA47879591 : BA47879591