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Bibliographic Record
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- Material Type
- 図書
- Author/Editor
- a specialty conference of 2006 Microelectronics Institute Inter on-chip Connection
- Author Heading
- Publication, Distribution, etc.
- Publication Date
- 2006]
- Publication Date (W3CDTF)
- 2006
- Size
- 28 cm
- Alternative Title
- International Chemical-Mechanical Planarization for ULSI Multilevel Interconnection Conference (CMP-MIC)11th International Chemical-Mechanical Planarization for ULSI Multilevel Interconnection Conference
- Place of Publication (Country Code)
- us