広範囲(100mm角)・微細(100nm幅)形状のための金型転写技術の開発

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Material Type: 図書
Title: 広範囲(100mm角)・微細(100nm幅)形状のための金型転写技術の開発
Title Transcription: コウハンイ 100mmカクビサイ 100nmハバケイジョウノタメノカナガタテンシャギジュツノカイハツ
Author/Editor: 研究代表者中尾政之
Author Heading: 中尾, 政之ナカオ, マサユキ
https://ci.nii.ac.jp/author/DA07857057
濱口, 哲也ハマグチ, テツヤ
土屋, 健介ツチヤ, ケンスケ
森田, 昇モリタ, ノボル
https://ci.nii.ac.jp/author/DA12172422
Publication, Distribution, etc.: 中尾政之
Publication Date: 2007.5
Publication Date (W3CDTF): 2007
Size: 30cm
Alternative Title: 平成17年度〜平成18年度科学研究費補助金(基盤研究(A))研究成果報告書
文部科学省科学研究費補助金(基盤研究(A))研究成果報告書
Place of Publication (Country Code): ja
Target Audience: 一般
Note (General): 課題番号: 17206012
研究分担者: 濱口哲也, 土屋健介, 森田昇
Related Material (URI): https://ci.nii.ac.jp/ncid/BA88875183#entity
Data Provider (Database): 国立情報学研究所 : CiNii Research
Original Data Provider (Database): CiNii Books
https://ci.nii.ac.jp/books
NCID: https://ci.nii.ac.jp/ncid/BA88875183 : BA88875183