Electron-beam, X-ray, and ion-beam submicrometer lithographies for manufacturing IV : 28 February-1 March 1994, San Jose, California

Material type: 図書

Author: David O. Patterson, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organization, SEMI--Semiconductor Equipment and Materials International

Publisher: SPIE

Publication date: c1994

Material Format: Paper

Capacity, size, etc.: 28 cm

NDC: -

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Note (General)：: Includes bibliographical references and index

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Paper

Material Type: 図書
ISBN: 0819414891
Title: Electron-beam, X-ray, and ion-beam submicrometer lithographies for manufacturing IV : 28 February-1 March 1994, San Jose, California
Author/Editor: David O. Patterson, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organization, SEMI--Semiconductor Equipment and Materials International
Author Heading: Patterson, David O.
Society of Photo-optical Instrumentation Engineers
https://ci.nii.ac.jp/author/DA00848546
Semiconductor Equipment and Materials International
https://ci.nii.ac.jp/author/DA0468648X
Publication, Distribution, etc.: SPIE
Publication Date: c1994
Publication Date (W3CDTF): 1994
Size: 28 cm
Place of Publication (Country Code): us
Text Language Code: en
Subject Heading: Lithography, Electron beam -- Congresses
X-ray lithography -- Congresses
Ion beam lithography -- Congresses
Semiconductors -- Etching -- Congresses
Masks (Electronics) -- Congresses
LCC: TK7874
Target Audience: 一般
Note (General): Includes bibliographical references and index
Related Material: Proceedings
https://cir.nii.ac.jp/crid/1130282269217551104
Related Material (URI): https://ci.nii.ac.jp/ncid/BA27423508#entity
https://lccn.loc.gov/94065789
Periodical Title: Proceedings
https://cir.nii.ac.jp/crid/1130282269217551104
Data Provider (Database): 国立情報学研究所 : CiNii Research
Original Data Provider (Database): CiNii Books
https://ci.nii.ac.jp/books
NCID: https://ci.nii.ac.jp/ncid/BA27423508 : BA27423508
LC Control Number: 94065789
https://lccn.loc.gov/94065789