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OSA proceedings on extreme ultraviolet lithography v. 23

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OSA proceedings on extreme ultraviolet lithography v. 23

Material type
図書
Author
edited byFrits Zernike and David T. Attwood ; sponsored by Optical Society of America
Publisher
The Society
Publication date
c1995
Material Format
Paper
Capacity, size, etc.
24 cm
NDC
-
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Notes on use

Note (General)：

v. 23: Proceedings of the Topical Meeting, September 19-21, 1994, Monterey, CaliforniaIncludes bibliographical references and index

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Paper

Material Type
図書
ISBN
1557523630
Title
OSA proceedings on extreme ultraviolet lithography
Volume
v. 23
Author/Editor
edited byFrits Zernike and David T. Attwood ; sponsored by Optical Society of America
Author Heading
Zernike, Frits
https://ci.nii.ac.jp/author/DA06696098Leave the NDL website.
Attwood, David T.
https://ci.nii.ac.jp/author/DA01609325Leave the NDL website.
OSA Topical Meeting
https://ci.nii.ac.jp/author/DA00964423Leave the NDL website.
Publication, Distribution, etc.
The Society
Publication Date
c1995
Publication Date (W3CDTF)
1995
Size
24 cm